SiC Wafer

Production/Research/Dummy grade wafers, epi-ready single crystal

 
 
 
Product:Silicon carbide (SiC) wafer
Diamter:2'' / 3''
Polytype:4H / 6H
Conductive type:

• n-type (N)

• Semi-insulating (SI)

Orientation:

• On-axis: <0001>

• Off-axis: 1° / 3.5° / 4° / 8° towards <11-20>

Grade:Production GradeResearch GradeDummy Grade
Quality & price:HighMedium Low
Micro-pipe density:< 10 cm-2< 30 cm-2< 100 cm-2
Resistivity (Ω·cm):4H-N0.01 - 0.034H-N0.01 - 0.14H-N0.01 - 0.1
6H-N0.02 - 0.16H-N0.02 - 0.26H-N0.02 - 0.2
6H-SI> 105 (90%)6H-SI> 105 (80%)6H-SI> 105 (70%)
Usable area:> 90%> 80%> 70%
TTV / bow / Wrap:< 25 um
Polishing:Single / double side epi-polished
Surface roughness:< 1 nm
Useful Links:Properties and applications of SiC